Lithography Equipment Market Size, Share & Industry Analysis, By Type (EUV and DUV), By Technology (ArF Scanners, KrF Steppers, i-line Steppers, ArF Immersion, Mask Aligners, and Others), By Applications (Advanced Packaging, LED, MEMs, and Power Devices), By Packaging Platforms (3D IC, 2.5D Interposer, Wafer Level Chip Scale Packaging, FO WLP Wafer, 3D WLP, and Others), and Regional Forecast, 2025 – 2032

Last Updated: November 17, 2025 | Format: PDF | Report ID: FBI110434

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ATTRIBUTE	DETAILS
Study Period	2019-2032
Base Year	2024
Estimated Year	2025
Forecast Period	2025-2032
Historical Period	2019-2023
Growth Rate	CAGR of 9.2% from 2025 to 2032
Unit	Value (USD Billion)
Segmentation	By Type EUV DUV By Technology ArF Scanners KrF Steppers i-line Steppers ArF Immersion Mask Aligners Others (Laser Direct Imaging) By Applications Advanced Packaging LED MEMs Power Devices By Packaging Platforms 3D IC 2.5D Interposer Wafer Level Chip Scale Packaging (WLCSP) FO WLP Wafer 3D WLP Others (Glass Panel Imposer) By Region North America (By Type, By Technology, By Applications, By Packaging Platforms, and By Country) U.S. Canada Mexico South America (By Type, By Technology, By Applications, By Packaging Platforms, and By Country) Brazil Argentina Rest of South America Europe (By Type, By Technology, By Applications, By Packaging Platforms, and By Country) Germany France Italy Spain Russia Benelux Nordics Rest of Europe Middle East & Africa (By Type, By Technology, By Applications, By Packaging Platforms, and By Country) Turkey Israel GCC South Africa North Africa Rest of the Middle East & Africa Asia Pacific (By Type, By Technology, By Applications, By Packaging Platforms, and By Country) China India Japan South Korea ASEAN Oceania Rest of Asia Pacific