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Semiconductor Defect Inspection Equipment Market Size, Share & Industry Analysis, By Type (Wafer Inspection Systems, Mask Inspection Systems, Reticle Inspection Systems, and Package Inspection Systems), By Technology (Optical Inspection, E-beam Inspection, X-ray Inspection, and UV & Infrared Inspection), By Application (Integrated Circuits, Memory Devices, Light Emitting Diodes (LED), and Micro Electro Mechanical Systems), By End User (Integrated Device Manufacturers, Semiconductor Foundries, and Test Home), and Regional Forecast, 2025-2032

Last Updated: November 17, 2025 | Format: PDF | Report ID: FBI112314

 


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ATTRIBUTE

DETAILS

Study Period

2019-2032

Base Year

2024

Forecast Period

2025-2032

Historical Period

2019-2023

Growth Rate

CAGR of 8.60% from 2025 to 2032

Unit

Value (USD Billion)

Segmentation

By Type, By Technology, By Application, By End User, and By Region

Segmentation

By Type

  • Wafer Inspection Systems
  • Mask Inspection Systems
  • Reticle Inspection Systems
  • Package Inspection Systems

By Technology

  • Optical Inspection
  • E-beam Inspection
  • X-ray Inspection
  • UV and Infrared Inspection

By Application

  • Integrated Circuits
  • Memory Devices
  • Light Emitting Diodes (LED)
  • Micro Electro Mechanical Systems

By End User

  • Integrated Device Manufacturers
  • Semiconductor Foundries
  • Test Home

By Region

  • North America (By Type, By Technology, By Application, By End User, and By Country)
    • U.S. (By Type)
    • Canada (By Type)
    • Mexico (By Type)
  • Europe (By Type, By Technology, By Application, By End User, and By Country)
    • Germany (By Type)
    • U.K. (By Type)
    • France (By Type)
    • Italy (By Type)
    • Spain (By Type)
    • Russia (By Type)
    • Nordics (By Type)
    • Benelux (By Type)
    • Rest of Europe
  • Asia Pacific (By Type, By Technology, By Application, By End User, and By Country)
    • China (By Type)
    • India (By Type)
    • Japan (By Type)
    • South Korea (By Type)
    • Southeast Asia (By Type)
    • Oceania (By Type)
    • Rest of Asia Pacific
  • Middle East & Africa (By Type, By Technology, By Application, By End User, and By Country)
    • GCC (By Type)
    • South Africa (By Type)
    • Rest of the Middle East & Africa
  • South America (By Type, By Technology, By Application, By End User, and By Country)
    • Brazil (By Type)
    • Argentina (By Type)
    • Rest of South America

Key Market Players Profiles in the Report

KLA Corporation (U.S.), Applied Materials (U.S.), ASML Holding (Netherlands), Onto Innovations Inc (U.S.), JEOL Ltd (Japan), Lasertech Corporation (Japan), NIKON (Japan), Veeco Instruments Inc (U.S.), Hitachi High Technologies Corporation (Japan), and Screen Holdings Co. Ltd (Japan).

  • 2019-2032
  • 2024
  • 2019-2023
  • 200
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