EUV Lithography Market Size, Share & Industry Analysis, By Equipment (Light Source, Optics, Mask, and Others), By End-user (Integrated Device Manufacturer and Foundries), and Regional Forecast, 2026 – 2034

Last Updated: January 19, 2026 | Format: PDF | Report ID: FBI113102

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Table of Content

Introduction
1. Definition, By Segment
2. Research Methodology/Approach
3. Data Sources
Executive Summary
Market Dynamics
1. Macro and Micro Economic Indicators
2. Drivers, Restraints, Opportunities and Trends
3. Impact of Generative AI
Competition Landscape
1. Business Strategies Adopted by Key Players
2. Consolidated SWOT Analysis of Key Players
3. Global EUV Lithography Key Players (Top 3 – 5) Market Share/Ranking, 2025
Global EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Region (USD)
  1. North America
  2. South America
  3. Europe
  4. Middle East & Africa
  5. Asia Pacific
North America EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. United States
  2. Canada
  3. Mexico
South America EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. Brazil
  2. Argentina
  3. Rest of South America
Europe EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. United Kingdom
  2. Germany
  3. France
  4. Italy
  5. Spain
  6. Russia
  7. Benelux
  8. Nordics
  9. Rest of Europe
Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. Turkey
  2. Israel
  3. GCC
  4. North Africa
  5. South Africa
  6. Rest of MEA
Asia Pacific EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. China
  2. India
  3. Japan
  4. South Korea
  5. ASEAN
  6. Oceania
  7. Rest of Asia Pacific
Company Profiles for Top 10 Players (Based on data availability in public domain and/or on paid databases)
1. ASML
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
2. Samsung Groups Co. Ltd.
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
3. Canon Inc.
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
4. NTT Advanced Technology Corporation
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
5. Nikon Corporation
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
6. KLA Corporation
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
7. ADVANTEST CORPORATION
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
8. Ushio Inc.
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
9. TOPPAN PHOTOMASKS
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
10. SUSS MicroTec SE
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
Key Takeaways

Introduction
1. Definition, By Segment
2. Research Methodology/Approach
3. Data Sources
Executive Summary
Market Dynamics
1. Macro and Micro Economic Indicators
2. Drivers, Restraints, Opportunities and Trends
3. Impact of Generative AI
Competition Landscape
1. Business Strategies Adopted by Key Players
2. Consolidated SWOT Analysis of Key Players
3. Global EUV Lithography Key Players (Top 3 – 5) Market Share/Ranking, 2025
Global EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Region (USD)
  1. North America
  2. South America
  3. Europe
  4. Middle East & Africa
  5. Asia Pacific
North America EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. United States
  2. Canada
  3. Mexico
South America EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. Brazil
  2. Argentina
  3. Rest of South America
Europe EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. United Kingdom
  2. Germany
  3. France
  4. Italy
  5. Spain
  6. Russia
  7. Benelux
  8. Nordics
  9. Rest of Europe
Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. Turkey
  2. Israel
  3. GCC
  4. North Africa
  5. South Africa
  6. Rest of MEA
Asia Pacific EUV Lithography Market Size Estimates and Forecasts, By Segments, 2021-2034
1. Key Findings
2. By Equipment (USD)
  1. Light Source
  2. Optics
  3. Mask
  4. Others (Mirror, etc.)
3. By End-user (USD)
  1. Integrated Device Manufacturer
  2. Foundries
4. By Country (USD)
  1. China
  2. India
  3. Japan
  4. South Korea
  5. ASEAN
  6. Oceania
  7. Rest of Asia Pacific
Company Profiles for Top 10 Players (Based on data availability in public domain and/or on paid databases)
1. ASML
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
2. Samsung Groups Co. Ltd.
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
3. Canon Inc.
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
4. NTT Advanced Technology Corporation
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
5. Nikon Corporation
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
6. KLA Corporation
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
7. ADVANTEST CORPORATION
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
8. Ushio Inc.
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
9. TOPPAN PHOTOMASKS
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
10. SUSS MicroTec SE
  1. Overview
    1. Key Management
    2. Headquarters
    3. Offerings/Business Segments
  2. Key Details (Key details are consolidated data and not product/service specific)
    1. Employee Size
    2. Past and Current Revenue
    3. Geographical Share
    4. Business Segment Share
    5. Recent Developments
Key Takeaways

Read Less

List of Figures

Figure 1: Global EUV Lithography Market Revenue Share (%), 2025 and 2034

Figure 2: Global EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2034

Figure 3: Global EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2034

Figure 4: Global EUV Lithography Market Revenue Share (%), By Region, 2025 and 2034

Figure 5: North America EUV Lithography Market Revenue Share (%), 2025 and 2034

Figure 6: North America EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2034

Figure 7: North America EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2034

Figure 8: North America EUV Lithography Market Revenue Share (%), By Country, 2025 and 2034

Figure 9: South America EUV Lithography Market Revenue Share (%), 2025 and 2034

Figure 10: South America EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2034

Figure 11: South America EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2034

Figure 12: South America EUV Lithography Market Revenue Share (%), By Country, 2025 and 2034

Figure 13: Europe EUV Lithography Market Revenue Share (%), 2025 and 2034

Figure 14: Europe EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2034

Figure 15: Europe EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2034

Figure 16: Europe EUV Lithography Market Revenue Share (%), By Country, 2025 and 2034

Figure 17: Middle East & Africa EUV Lithography Market Revenue Share (%), 2025 and 2034

Figure 18: Middle East & Africa EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2034

Figure 19: Middle East & Africa EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2034

Figure 20: Middle East & Africa EUV Lithography Market Revenue Share (%), By Country, 2025 and 2034

Figure 21: Asia Pacific EUV Lithography Market Revenue Share (%), 2025 and 2034

Figure 22: Asia Pacific EUV Lithography Market Revenue Share (%), By Equipment, 2025 and 2034

Figure 23: Asia Pacific EUV Lithography Market Revenue Share (%), By End-user, 2025 and 2034

Figure 24: Asia Pacific EUV Lithography Market Revenue Share (%), By Country, 2025 and 2034

Figure 25: Global EUV Lithography Key Players' Market Share/Ranking (%), 2025

List of Tables

Table 1: Global EUV Lithography Market Size Estimates and Forecasts, 2021 – 2034

Table 2: Global EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2021 – 2034

Table 3: Global EUV Lithography Market Size Estimates and Forecasts, By End-user, 2021 – 2034

Table 4: Global EUV Lithography Market Size Estimates and Forecasts, By Region, 2021 – 2034

Table 5: North America EUV Lithography Market Size Estimates and Forecasts, 2021 – 2034

Table 6: North America EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2021 – 2034

Table 7: North America EUV Lithography Market Size Estimates and Forecasts, By End-user, 2021 – 2034

Table 8: North America EUV Lithography Market Size Estimates and Forecasts, By Country, 2021 – 2034

Table 9: South America EUV Lithography Market Size Estimates and Forecasts, 2021 – 2034

Table 10: South America EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2021 – 2034

Table 11: South America EUV Lithography Market Size Estimates and Forecasts, By End-user, 2021 – 2034

Table 12: South America EUV Lithography Market Size Estimates and Forecasts, By Country, 2021 – 2034

Table 13: Europe EUV Lithography Market Size Estimates and Forecasts, 2021 – 2034

Table 14: Europe EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2021 – 2034

Table 15: Europe EUV Lithography Market Size Estimates and Forecasts, By End-user, 2021 – 2034

Table 16: Europe EUV Lithography Market Size Estimates and Forecasts, By Country, 2021 – 2034

Table 17: Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, 2021 – 2034

Table 18: Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2021 – 2034

Table 19: Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, By End-user, 2021 – 2034

Table 20: Middle East & Africa EUV Lithography Market Size Estimates and Forecasts, By Country, 2021 – 2034

Table 21: Asia Pacific EUV Lithography Market Size Estimates and Forecasts, 2021 – 2034

Table 22: Asia Pacific EUV Lithography Market Size Estimates and Forecasts, By Equipment, 2021 – 2034

Table 23: Asia Pacific EUV Lithography Market Size Estimates and Forecasts, By End-user, 2021 – 2034

Table 24: Asia Pacific EUV Lithography Market Size Estimates and Forecasts, By Country, 2021 – 2034

STUDY PERIOD: 2021-2034
BASE YEAR: 2025
HISTORICAL DATA: 2021-2024
NO OF PAGES: 150

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