Semiconductor Metrology and Inspection Equipment Market Size, Share & Industry Analysis, By Type (Optical and Beam), By Technology (Wafer Inspection System, Mask Inspection System, Thin Film Metrology, Package Inspection, and Others), By Dimension (2D Metrology/Inspection and 3D Metrology/Inspection and Hybrid 2D/3D Systems), By End-User (Foundries, Integrated Device Manufacturing (IDM) Firms, Outsourced Semiconductor Assembly and Test (OSAT) Companies, and Others), and Regional Forecast, 2025 – 2032

The global semiconductor metrology and inspection equipment market size was valued at USD 14.13 billion in 2024. The market is projected to grow from USD 14.92 billion in 2025 to USD 24.29 billion by 2032, exhibiting a CAGR of 7.2% during the forecast period.

Semiconductor metrology and inspection play a crucial role in overseeing the semiconductor production process. The complete manufacturing process of semiconductor wafers consists of approximately 400 to 600 steps, which typically takes one to two months to complete. As a result, metrology and inspection procedures are applied at key stages of the semiconductor manufacturing process to ensure high-precision and defect-free processes.

The growth of this market is driven by many factors, including the growing need for more complex process nodes & 3D integration and rising demand from AI/data center chips. According to arXiv in March 2025, the leading supercomputer used approximately. 200,000 AI chips cost USD 7 billion in hardware, and draw 300 MW of power. The swift transition towards intricate chip packaging methods such as Fan-Out Wafer-Level Packaging (FOWLP), System-in-Package (SiP), and 3D ICs is greatly increasing the need for advanced inspection and metrology instruments. Moreover, the shift from “point tools” to integrated process-control platforms is also a key trend for market growth. Thus, these factors are increasing the market share.

The major players included in this market are KLA Corporation, Applied Materials, Inc., Onto Innovation, Inc., Carl Zeiss AG, ASML Holding N.V., Camtek, Hitachi High-Tech Corporation, Lasertec Corporation, Nova Ltd., and SCREEN Semiconductor Solutions Co., Ltd.

IMPACT OF GENERATIVE AI

Production of chips is being redefined by Generative AI, which consequently brings about a shift in the metrology and inspection of semiconductors. Variability of factors leads to improved precision and enhancement in the workflow process of production through automation. The implementation of AI-based semiconductor manufacturing assures chip producers excellent defect scrutiny and exceptional yield optimization.

• For instance, in July 2025, TSMC introduced a deep learning-based defect detection system that was trained on billions of wafer images, enabling it to recognize and categorize defects with 95% accuracy.

IMPACT OF RECIPROCAL TARIFFS

Reciprocal tariffs raise the cost of semiconductor metrology and inspection solutions, thereby pressuring vendor margins and fab CAPEX budgets. Higher duties can delay tool purchases by fabs, in turn making the fabs prioritize only essential inspection systems. It accelerates China’s drive for domestic alternatives also. In the long run, tariffs fragment supply chains besides intensifying technology decoupling between the U.S., allies, and China.

MARKET DYNAMICS

Market Drivers

Growing Demand for Low-Cost and High-Performance Semiconductors to Aid Market Growth

The increase in demand for high-performance, cost-effective semiconductor materials is driven by end-user product markets such as smartphones, consumer electronics, automotive, and others. This also extends to growth areas based on advances in technology that are creating demand (e.g., wireless technologies (5G) and AI). Moreover, the semiconductor industry is expected to invest in this equipment due to the rising trend of Internet of Things (IoT) devices aimed at creating smart products.

• The emphasis on high-performance computing is further supported by regional usage trends, with forecasts suggesting that by 2027, 90% of North American subscriptions will utilize 5G technology, followed by 82% in Western Europe and 80% in the Gulf Cooperation Council regions.

Market Restraints

Integration Complexity and Long Qualification Cycles to Hinder Market Expansion

A key restraint in the semiconductor metrology and inspection market is the difficulty of integrating diverse tools with different calibrations and data formats. Synchronizing hardware, software, and workflows is complex, while massive data volumes strain traditional processing, leading to delays, errors, and higher costs if not managed with advanced real-time solutions.

Market Opportunities

Rise in AI / ML for Defect Classification and Predictive Analytics to Create Lucrative Market Opportunities

AI/ML in semiconductor inspection enables automatic defect classification and predictive analytics, reducing false positives and accelerating root-cause analysis. Learning from wafer/process data helps fabs predict defect hotspots and prevent yield loss rather than reacting after failures. This delivers high ROI, as even small yield improvements translate to hundreds of millions in savings at advanced nodes.

Semiconductor Metrology and Inspection Equipment Market Trends

Increased Shift from “Point Tools” to Integrated Process-Control Platforms to Emerge as a Key Market Trend

The industry is moving from disconnected point tools, inspection, or metrology systems used singly to holistic process-control platforms that consolidate all measurement, inspection, and analytics functionalities into one system. While using separate tools where insight cannot be stored, these processes for real-time sharing of data across the steps provide closed-loop process control, faster yield tuning, and variation control.

SEGMENTATION ANALYSIS

By Type

Demand for Highly Accurate Detection Boosted Expansion of Optical Equipment

Based on type, the market is segmented into optical and beam.

By share, the optical segment led the market in 2024. The segment is expected to lead with a 59.3% share in 2025. Optical types measure, analyze, and inspect, with nanometer accuracy, integrated circuits, semiconductor wafers, and packaging. This type of inspection allows for the vision of nanometer-scale defects using high-end optical systems.

The beam segment will achieve the highest compound annual growth rate (CAGR) of 9.33% during the forecast period.

By Technology

Thin Film Technology Dominated Market with its Essential Contribution to Evaluating Characteristics of Films

Based on technology, the market is categorized into wafer inspection system, mask inspection system, thin film metrology, package inspection, and others.

In 2024, the thin film metrology segment led the market share, driven by the need to control and optimize semiconductor manufacturing processes. Thin film metrology provides precise measurements of thin film layers down to the nanometer level. It employs techniques such as ellipsometry, reflectometry, and spectrometry to evaluate the characteristics of the films. In 2025, the segment is anticipated to dominate with a 31.3% share.

The wafer inspection system segment is expected to witness the highest CAGR of 8.76% during the forecast period.

By Dimension

2D Metrology/Inspection Dominated Market with Its Widespread Usage in Mid-Range Process Nodes

Based on dimension, the market is categorized into 2D metrology/inspection, 3D metrology/inspection, and hybrid 2D/3D systems.

In 2024, the 2D metrology/inspection segment accounted for the largest semiconductor metrology and inspection equipment market share. In 2025, the segment is predicted to dominate with a 48.9% share. 2D metrology and inspection tools are leading at mid-range and old process nodes. The tools are routine for flat devices and simple structures, where process nodes will be at 28 nm and more.

The 3D metrology/inspection is expected to have the highest CAGR of 9.18% throughout the forecast period.

By End-User

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Foundries Dominated Market for Increasing Need of Varied Customer Needs

Based on the end-user, the market is categorized into foundries, integrated device manufacturing (IDM) firms, outsourced semiconductor assembly and test (OSAT) companies, and others.

The foundries segment was the major segment in 2024, fueled by varied customer needs and ongoing technological advancements. Prominent foundries are vigorously integrating new metrology and inspection tools to accommodate an extensive array of process technologies, from established nodes to enhanced geometries. In 2025, the segment is anticipated to dominate with a 42.4% share.

The OSAT is mostly to witness the highest CAGR of 9.43% during the forecast period.

SEMICONDUCTOR METROLOGY AND INSPECTION EQUIPMENT MARKET REGIONAL OUTLOOK

By region, the market is divided into North America, Europe, South America, the Middle East & Africa, and Asia Pacific.

Asia Pacific

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The Asia Pacific held the dominant share in 2023, valued at USD 5.44 billion, and also took the leading share in 2024 with USD 5.72 billion. The growing Semiconductor fabs in Asia Pacific countries have created a steady demand for advanced inspection and metrology solutions. The focus of the region to improve indigenous semiconductor fabrication has caused increased investments in quality assurance and inspection technologies. In 2025, the Chinese market is estimated to reach USD 2.21 billion.

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During the forecast period, the North America region is projected to record a growth rate of 8.63%, which is the highest amongst all the regions, and reach a valuation of USD 4.68 billion in 2025. The region’s strength largely comes from significant investments in advanced semiconductor manufacturing and inspection technology facilities. The U.S. government’s semiconductor self-reliance initiative increased focus on domestic manufacturing capabilities and quality assurance activities. Backed by these factors, countries including the U.S. are expected to record the valuation of USD 3.42 billion, and Canada to record USD 0.85 billion in 2025. After Asia Pacific, the market in Europe is estimated to reach USD 2.58 billion in 2025 and secure the position of the third-largest region in the market.

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Over the forecast period, South America and the Middle East & Africa regions would witness a moderate semiconductor metrology and inspection equipment market growth. The South America market in 2025 is set to record USD 0.57 billion as its valuation. The region is experiencing expanding prospects fueled by rising investments in semiconductor production capabilities and quality assurance systems. In the Middle East & Africa, GCC is set to attain the value of USD 0.42 billion in 2025.

COMPETITIVE LANDSCAPE

KEY INDUSTRY PLAYERS

Notable Players to Implement Strategic Strategies to Expand Business Reach

Key players present in this market are offering semiconductor metrology and inspection equipment to provide users with enhanced quality control, increased manufacturing efficiency through automation and AI-driven analysis, and significant cost reduction by minimizing waste and improving yields. They concentrate on holding contracts with small and local businesses to grow their business. Moreover, such mergers & acquisitions, partnerships, and investments will create a surge in demand for this technology.

List of Key Semiconductor Metrology and Inspection Equipment Companies Studied (including but not limited to)

• KLA Corporation (U.S.)
• Applied Materials, Inc. (U.S.)
• Onto Innovation, Inc. (U.S.)
• Carl Zeiss AG (Germany)
• ASML Holding N.V. (Netherlands)
• Camtek (Israel)
• Hitachi High-Tech Corporation (Japan)
• Lasertec Corporation (Japan)
• Nova Ltd. (Israel)
• SCREEN Semiconductor Solutions Co., Ltd. (Japan)
• Thermo Fisher Scientific Inc. (U.S.)
• ai (Malaysia)
• Omni International (U.S.)
• X-Ray Optical Systems, Inc. (U.S.)
• Gatan, Inc. (U.S.)
• Evans Analytical Group (U.S.)
• VEECO Instruments Inc. (U.S.)
• Advanced Micro-Fabrication Equipment Inc. (AMEC) (China)
• Bruker Corporation (U.S.)
• Metryx Ltd. (U.K.)

…and more

KEY INDUSTRY DEVELOPMENTS

• June 2025: Rigaku increased its manufacturing capabilities for semiconductor process control instruments at its plants in Osaka and Yamanashi, Japan.
• October 2024: HORIBA STEC, Co., Ltd. launched the Xtrology, a Fully Automated Thin Film Inspection System. This system integrates various sensors and automation technology to enhance the value of semiconductor wafer inspection.
• July 2024: Nearfield Instruments secured USD 147.6 million in funding to increase the production of its wafer inspection devices intended for advanced AI chip manufacturing.
• March 2024: Hitachi High Tech Corporation launched a system, LS9300AD, to analyze non-patterned wafer surfaces for particles and defects on both the front and reverse sides.
• January 2024: Cohu, a provider of equipment and services aimed at enhancing the yield and productivity of semiconductor manufacturing, launched AI Inspection software, a new addition to its DI-Core analytics platform.
• April 2023: Rigaku, the provider of X-ray metrology tools for semiconductor in-line processes, research and development, and high-volume manufacturing, opened their first Semiconductor Metrology Technology Center focused on thin film inspection, metrology, and monitoring technologies, and more.

INVESTMENT ANALYSIS AND OPPORTUNITIES

Key players gain advantages from robust installed bases, service income, and packaging solutions, whereas smaller specialists provide greater growth potential. Although there are cyclical capital expenditure risks, long-term prospects are found in advanced packaging, AI-focused inspection software, and ongoing service models.

For instance, KLA Corporation achieves steady recurring revenue owing to its extensive installed base and services. Onto Innovation is leveraging the demand for advanced packaging inspection in AI and data-center applications.

REPORT COVERAGE

The report provides a detailed analysis of the market and focuses on key aspects, such as leading companies, product/types, and the leading end-user of the product. Besides, it offers insights into the semiconductor metrology and inspection equipment market trends and highlights key industry developments. In addition to the factors mentioned above, the report encompasses several factors that have contributed to the market's growth in recent years.

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REPORT SCOPE & SEGMENTATION